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  • Defect Inspection Review | Chip Manufacturing - KLA
    Patterned and unpatterned wafer defect inspection and review systems leverage unique photon and e-beam optical and sensor technologies and Al-driven algorithms to find, identify and classify particles and pattern defects on the front surface, back surface and edge of the wafer
  • Surface Defect Inspection and Quality Control for Electronic Chips
    We use a combination of multiple testing methods to detect and inspect the surface defects of electronic chips, and ensure the high quality and reliability of products through regular monitoring
  • Semiconductor Inspection - Newport
    Device manufacturers use optical detection systems to inspect wafers and masks for particles and other types of defects and to determine the position of these defects in an X-Y grid on the wafer The basic principle used for defect detection on non-patterned wafers is relatively simple
  • Inspection for particle contamination and surface defects
    Light assists in identifying damage and defects induced by ion implantation, ensuring a thorough inspection for particle contamination and surface irregularities during semiconductor fabrication Contact us for more information
  • 5. Wafer defect inspection system : Hitachi High-Tech Corporation
    Wafer defect inspection system detects physical defects (foreign substances called particles) and pattern defects on wafers and obtains the position coordinates (X, Y) of the defects Defects can be divided into random defects and systematic defects
  • Deep Learning-Based Integrated Circuit Surface Defect Detection . . .
    In this study, we aimed to address the primary challenges encountered in industrial integrated circuit (IC) surface defect detection, particularly focusing on the imbalance in information density arising from difficulties in data sample collection
  • Multi-scale GAN with transformer for surface defect inspection of IC . . .
    To tackle the inherent problems of unbalanced data and multi-scale defects embedded in the coarse and textured surface, we propose a novel multi-scale framework for surface defect inspection of IC metal packages
  • TSI - Surface Defect Inspection
    Surface defects in semiconductor manufacturing are detected using advanced inspection techniques such as optical microscopy, scanning electron microscopy (SEM), atomic force microscopy (AFM), and automated optical inspection (AOI)
  • Improving Accuracy of IC Surface Defects Detection via Enhanced . . .
    Abstract: An important step in integrated circuit (IC) manufacturing is inspection of the chip surface for defects In practice, there exists a data imbalance problem associated with IC surface defect images which affects the detection performance of a deep learning-based detection model
  • Semiconductor Die Surface Inspection – Electronics - Cognex
    The Cognex AI-based defect detection tool can find a wide range of unacceptable cosmetic defects on die surfaces that are otherwise be too complex or time-consuming for rules-based vision inspection systems The tool examines the surface of the die to detect any combination of cracks, chips, or burn marks





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